Nikon recently announced the new FPD FX-6AS lithography system, which is designed for the production of small to medium-sized flat panels. Nikon believes the FX-6AS is the optimal system for producing organic light-emitting diode (OLED) panels and high-definition LCD panels for mobile devices, including smartphones.
Thanks to the newly developed projection lens, the FX-6AS is said to offer the highest resolution, high alignment accuracy and high bandwidth. The FX-6AS uses the i-line light source used in existing models. This allows for the production of high-resolution panels in large volumes without changing well-established production processes.
The system resolution is 1.2 µm, the alignment accuracy is within ± 0.23 µm. This lithographic system is designed to produce LTPO (Low Temperature Polycrystalline Oxide) panels using G6 (1500 x 1850 mm) substrates. The processing time for one plate is 42 s. LTPO technology enables the production of high-resolution panels with high refresh rates and low power consumption.
The Nikon FPD FX-6AS is set to go on sale in early November this year.
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